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Use of a NOM profilometer to measure large aspheric surfaces

Pearson, John L, Roberts, Gareth W, Rees, Paul and Thompson, Samantha J (2015) Use of a NOM profilometer to measure large aspheric surfaces. Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 9628.

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Abstract

The use of autocollimator-based profilometers of the Nanometer Optical measuring Machine (NOM) design has been reported for the evaluation of X-ray optics for some time. We report a related development in the use of a non-contact NOM profilometer for the in situ measurement of base radius of curvature and conic constant for E-ELT primary mirror segments during fabrication. The instrument is unusual in NOM design in that it is deployable onto a CNC polishing machine in an industrial fabrication environment. Whilst the measurement of radius of curvature of spherical surfaces over a single scan has been reported previously, here we report on the use of this instrument to measure optical surfaces with an aspheric departure of 180 micrometers using a grid of multiple scans and bespoke surface fitting software. The repeatability of the measurement has been found to be approximately 1 mm in a measured radius of curvature of approximately 90 m. The absolute accuracy is limited by the accuracy of the calibration of the autocollimator and the in situ calibration of the instrument during operation.

Item Type: Article
Keywords: Organic materials, Profilometers, Equipment and services, Fabrication, Autocollimators, Calibration, Polishing equipment, In situ metrology, Mirrors, Nanotechnology
Divisions: Applied Science, Computing and Engineering
Depositing User: Mr Stewart Milne
Date Deposited: 28 Mar 2017 14:01
Last Modified: 26 Apr 2018 13:51
URI: http://glyndwr.collections.crest.ac.uk/id/eprint/15529

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